micro-optical structured surfaces, micro-structured surfaces, optical structured surfaces, structured surfaces, optical surfaces, optical screens, engineered diffusers,diffusion screens, phase plates, projection screens, illumination control, illumination screens, light management, solid-state lighting, micro-optics, ion etching, laser writing, beam shapers, microlens arrays, diffractive optical elements, optics, arbitrary divergence angle, broadband illumination, microlens technology, lithography, laser illumination, etching, excimer-laser illumination, photonics, holographic diffusers, diffractive diffusers, laser beam homogenizers, laser micro-machining, illumination systems